Why does only one company make the machines that print the smallest chips?

The machines that print the world's smallest chips come from one Dutch company, and one stage of them fires a laser at tin droplets.

Only one company makes the machines that print the smallest chips because the machines are extraordinarily hard to build, and it took decades and partners from many countries to make them work. ASML, a Dutch company, is as of 2026 the world's only manufacturer of (EUV) machines, which are required to make the most advanced chips. EUV lithography is a kind of photolithography that uses light with a of 13.5 nanometres to create intricate patterns on a silicon .

The reason for such short- light is that smaller light draws smaller details. In the 1960s chipmakers used visible light with wavelengths as short as 435 nanometres. Later they moved to ultraviolet light of 365, then 248 and then 193 nanometres, called deep UV. The step after that, EUV, caused problems: EUV light is absorbed by glass and air, so mirrors in a vacuum are needed instead of lenses. The leading stepper producers Canon and Nikon stopped development.

Shorter light, smaller chips
  1. 1960s

    Visible light, down to 435 nm

  2. Later

    UV light at 365, 248 and 193 nm (deep UV)

  3. 2006

    First EUV prototype: one in 23 hours

  4. 2022

    Up to 200 wafers an hour

ASML kept going. It began developing EUV technology in 1997, and in July 2012 Intel invested $4.1 billion in ASML for a 15 percent stake to help fund the expensive research. The first prototype, in 2006, produced one in 23 hours. As of 2022 a scanner produces up to 200 wafers per hour.

Because the machines are so important, governments pay attention. The United States pressured Dutch authorities to restrict the sale of EUV machines to China, and ASML follows Dutch export controls, under which it has no authority to ship them there. Reuters reported in December 2025 that China had developed its own prototype EUV system.

Try it

Smaller light, smaller features

0100200300400050100150200wavelength of light, nmsmallest feature, nm

y = 1.33x + 0

Challenge · Keep 1.33 (k1 0.44 and NA 0.33): compare the feature at 13.5 nm with the one at 193 nm.

A simple model: smallest feature = (k1 ÷ NA) × wavelength, so for fixed optics it shrinks in proportion to the light. Real deep UV tools use different optics.

Quiz me

0/3

  1. 1.Why do chipmakers move to light with a shorter wavelength?
  2. 2.Why do EUV machines use mirrors in a vacuum instead of lenses?
  3. 3.Which fact helps explain why ASML ended up as the only EUV maker?

Recap

Smaller light draws smaller details, and the machines that make EUV light are so hard to build that only one company does.

💡 A trick to remember it · Shorter light, finer pencil: a very sharp pencil takes a very special pencil factory.

Surprising fact · The first EUV prototype in 2006 took 23 hours to produce one wafer.

Sources (2)

No source, no claim. Every fact in this lesson (15 claims) cites at least one of these.

  1. [1]Extreme ultraviolet lithography · Wikipedia
  2. [2]ASML Holding · Wikipedia
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